-40%
KH Fredricks RF Sputterer System - 10" targets with RF sputter etchback
$ 5016
- Description
- Size Guide
Description
• System was in service at the time it was decommissioned• Vacuum tight chamber
• 2 - 10" targets with sputter etchback
• Water cooled platen rotates using Ferro-Fluidic rotary spindle assembly
• OEM Manual – with system, electrical and wafer platen mechanical drawing
• 2 Advance Energy AE RFX-600 RF power supplies
• 2 MCS Inc ATN 500B RF matching networks
• Granville Phillips 360 UHV Stabil-Ion Dual Ion Gauge Controller
• Manual shutter
• DOES NOT INCLUDE: cyropump or LH Turbo pump controller which was left over from RGA setup used by previous owner. NO Turbo Pump on system or included in sale
• Estimated combined weight at 1400 lbs
• We can construct 2 custom skids for 0 and work with your freight company if desired.
• Photos show item you are bidding on
• We are unable to test this item
• All sales are final with no right of return or exchange.
• Ships only to US
• Item must be paid for within 3 days or it will be relisted
• DISCLAIMER OF WARRANTIES.,THE EQUIPMENT DESCRIBED ABOVE, BEING SOLD, IS SOLD IN “AS IS” CONDITIONS AND THAT WE EXPRESSLY DISCLAIM HEREBY, ANY AND ALL WARRANTIES EXPRESS OR IMPLIED, INCLUDING FITNESS FOR A PARTICULAR PURPOSE. YOU’RE PAYMENT OF THE GOODS AND EQUIPMENT INVOICED HEREON CONSTITUTES ACCEPTANCE OF THIS DISCLAIMER